转自：新华财经 10月22日，第十五届中国国际纳米技术产业博览会（下称"纳博会"）在苏州工业园区开幕。除大咖云集的主报告与前沿 论坛外，25000平方米展区人头攒动，成为体验纳米技术重塑未来的核心场域。八大特色展团与MEMS制造、具身感知、 先进电子材料、材料制备四大全新专区，共同构筑起科技与产业深度融合的"纳米万花筒"。 聚焦"终极制造"，原子级技术从实验室迈向产业舞台 原子级制造是以能量作用于原子或原子级基元，制造全新材料、器件与系统的先进技术，被誉为制造技术"终极形态"。 在本届纳博会上，该前沿课题成为众多专家热议焦点。 位于展区核心位置的中国科学院苏州纳米技术与纳米仿生研究所展台，打出了"为原子级制造提供极限环境保障""革新从 原子开始，产业向未来进发"等标语。该所的纳米真空互联实验站，是原子级制造的关键支撑平台。 "真空互联技术是原子级制造的必备条件。"中国科学院苏州纳米所纳米真空互联实验站研究员张珽说，实验站能提供"地 球上最洁净的环境"，有效隔绝水、氧等对原子尺度材料的干扰，助力材料与芯片实现超高算力、超高检测精度、超低功 耗等突破。目前，该装置已吸引近300家用户在此开展研发，成为衔接基础研究 ...

Core Points - The CHInano 2025, the 15th International Nano Technology Industry Expo, will be held from October 22-24, 2025, at the Suzhou International Expo Center, featuring over 300 renowned companies showcasing the latest technological achievements in a 25,000 square meter exhibition area [1][57]. - The event will gather more than 600 experts and industry leaders to discuss cutting-edge topics such as micro-nano manufacturing, third-generation semiconductors, and AI technology applications, with an expected attendance of over 27,000 participants [6][9]. Group 1: Event Overview - The CHInano 2025 will focus on various advanced fields including micro-nano manufacturing, third-generation semiconductors, and flexible printed electronics [6][12]. - The event will feature a main report, 15 frontier conferences, and multiple matchmaking sessions, aiming to foster collaboration and innovation in the nano technology sector [6][9]. Group 2: Key Speakers and Sessions - Notable speakers include experts from top universities and companies, such as Yue Hao from Xidian University and Ralf Schellin from Bosch Sensortec, who will address topics related to AI and semiconductor integration [10][11]. - The main report will cover critical issues such as technological breakthroughs and industrialization bottlenecks, contributing to a virtuous cycle of research, development, and application [9][10]. Group 3: Specialized Forums and Conferences - The event will host specialized forums such as the MEMS Manufacturing Conference, focusing on the MEMS sensor industry chain and technological innovations [11][12]. - Other forums will address topics like advanced materials, flexible electronics, and nano-imprinting technology, showcasing the latest research and industrial applications [19][22][33]. Group 4: Networking and Collaboration Opportunities - The expo will include a supply-demand matchmaking event aimed at bridging information gaps in the nano technology industry, facilitating precise matching between supply and demand [57][58]. - The event is expected to enhance collaboration across various sectors, including research, production, and investment, thereby promoting the sustainable development of the nano technology industry [57][58].

Core Insights - The 15th China International Nanotechnology Industry Expo will be held from October 22 to 24 in Suzhou, featuring over 150 national talents and more than 500 top global scientists and industry experts [1][2] - The event will include one main report, 15 sub-forums, and 605 industry reports, focusing on technological breakthroughs and industry trends [1] - The exhibition area will cover 25,000 square meters, showcasing the entire global nanotechnology industry chain [1] Group 1 - The expo will focus on cutting-edge areas such as micro-nano manufacturing, third-generation semiconductors, flexible printed electronics, nano-imprinting, and fiber/gel materials [1][2] - New thematic conferences will be introduced, including advanced materials and devices atomic-level manufacturing, semiconductor heterogeneous integration, and micro-nano technology innovation [2] - The number of reports has increased by approximately 26% compared to last year, with 440 standard exhibition booths established, expanding the exhibition area by 4% [1][2] Group 2 - The event aims to promote the practical application of nanotechnology and connect the entire industry chain [3] - A supply-demand matching meeting will be held, focusing on new materials, embodied robots, and consumer products, facilitating efficient connections between technology providers and industry demand [3] - International participation has increased, with companies from the US and Germany joining for the first time, enhancing the expo's global presence [2]

在万物互联的时代浪潮中，传感器作为物联网、工业互联网、大数据与人工智能等前沿技术 的核心元器件，正成为推动产业智能化升级的关键基石。而微机电系统（英文：Micro-Electro- Mechanical System，以下简称 "MEMS" ）得益于 小体积、高稳定、高精度、低成本 等优势， 随着国家重大装备性能和人民生活质量提升的双重需求，在传感器应用领域愈发重要。 MEMS 对MEMS的探索可起源于20世纪50年代，一直以来， 生产制造是MEMS产业链的最关键环 节 。MEMS源于集成电路的工艺基础，线宽以90nm-0.35mm为主，虽然不像半导体先进制程达 到28nm以下，但MEMS元器件结构相对复杂，除了延用集成电路的成熟工艺以外还需引入特殊工 艺。MEMS传感器芯片本质上是在硅片上制造极微小化机械系统和集成电路的集合体，加工工艺 具有明显的非标准化和定制化特征， 制造的工艺水平基本上决定了MEMS产品的基准性能 ，并 且对供应链体系支撑有较高的要求，从特定角度来说，MEMS工艺要求、MEMS定制化设备需求 比集成电路要更高，因而MEMS晶圆制造决定了MEMS的产业化上限。 24000㎡微纳制造与传感 ...