晶圆加热器主要是用于半导体晶圆制造过程中的 CVD 、 Etch 等工艺环节，为硅片提供一致的热量，确保工艺的稳定性和均匀性。 晶圆加热器（加热盘）作为晶圆加工的载体和射频回路的下电极，在晶圆制造设备中应用广泛。加热器通常位于工艺设备反应腔内，如 薄膜沉积设备，反应腔腔内关键件包含喷淋头，加热盘，腔内陶瓷件，抽气设置等。加热器的温度均匀性直接决定薄膜沉积等工艺性 能；加热器通常在硅片的正下方，直接或问接（通过吸盘）接触硅片，其自身的洁净度直接决定了污染物的水平，同时，其加热后的放 气性也决定了真空环境的稳定性。 晶圆加热器全球市场总体规模情况 0 1 根据 QYR esearch （恒州博智）的统计及预测， 2024 年全球晶圆加热器市场销售额达到了 9.82 亿美元，预计 2031 年将达到 15.64 亿美 元，年复合增长率（ CAGR ） 6% （ 2025-2031 ）。地区层面来看，中国大陆市场在过去几年变化较快， 2024 年市场规模为 1.5 亿美 元，约占全球的 15.35 % ，预计 2031 年将达到 2.94 亿美元，届时全球占比将达到 18.83 % 。 消费层面来说，目前北美和日本地 ...

Core Viewpoint - The global wafer heater market is projected to reach USD 1.677 billion by 2032, with a compound annual growth rate (CAGR) of 6% in the coming years [4]. Global Market Overview - The wafer heater market is primarily utilized in semiconductor wafer manufacturing processes, including CVD and etching, providing consistent heat to ensure process stability and uniformity [2]. - Major manufacturers in the global wafer heater market include NGK, Mico Ceramics, Watlow, Mecaro, and KSM, with the top five companies holding approximately 66% market share [6]. - Ceramic heaters are the dominant product type, accounting for about 69% of the market [10]. - The 300mm wafer is the primary demand source, representing around 81% of the market [11]. Industry Development Opportunities and Drivers - The semiconductor industry is experiencing a push for local supply chain development, with governments increasing support for semiconductor equipment and materials. This trend benefits wafer heaters as key components of high-end machinery [15]. - The EU's Chips Act, passed in April 2023, is expected to provide €43 billion in subsidies for semiconductor manufacturing, while the UK plans to offer £1 billion in support over the next decade [15]. - The growth in end-device market size is driving the demand for wafer heaters, as advanced processes require more deposition and etching steps, leading to increased equipment needs [16]. - China remains a significant area for equipment investment and installation, with local suppliers moving towards stable bulk supply to meet demand [16]. Industry Challenges - The semiconductor equipment industry is highly dependent on technological breakthroughs and resource integration, posing challenges for new entrants due to high barriers to entry [17]. - New entrants face difficulties in establishing customer bases and navigating complex certification processes, which can be time-consuming [17]. - The market is competitive, especially for Chinese semiconductor equipment manufacturers, who must enhance their technology and product quality to compete effectively [18]. - Manufacturing processes and raw material supply constraints present challenges for high-end applications, particularly in achieving temperature uniformity [18]. Future Market Projections - The global wafer heater market is expected to grow significantly, with projections indicating a market size of approximately 11.404 billion yuan by 2032, up from 8.0376 billion yuan in 2026, reflecting a strong CAGR from 2026 to 2032 [24][25].