等离子体工艺腔室仿真平台(MAPS)
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首款等离子体工艺腔室仿真平台面世
Zhong Guo Hua Gong Bao· 2026-01-28 04:24
Core Viewpoint - The research team from Dalian University of Technology has developed China's first plasma process chamber simulation platform (MAPS) with independent intellectual property rights, which can replicate real manufacturing processes in a virtual environment to facilitate product development and performance prediction [1] Group 1: Technology Development - MAPS allows comprehensive simulation of atomic-level manufacturing equipment, including external control parameters and device geometric structures, providing final evolution results to save development time and improve efficiency [1] - The technology has been applied in several companies, including Tuojing Technology and Huawei, achieving a 15% reduction in economic costs and a 20% reduction in time costs compared to similar foreign products [1] Group 2: Collaboration and Talent Development - The team has established in-depth collaborations with many leading domestic enterprises, creating joint laboratories that enable students to participate in joint technology development projects during their studies, thus cultivating more high-end talent for the industry [1]
等离子体工艺腔室仿真平台研发成功
Ke Ji Ri Bao· 2026-01-19 00:36
Core Viewpoint - The development of the first domestically produced plasma process chamber simulation platform (MAPS) by Dalian University of Technology represents a significant advancement in atomic-level manufacturing technology, addressing existing technical bottlenecks in the industry [1] Group 1: Technology Development - MAPS can simulate the entire manufacturing process in a virtual environment, allowing for early product development and performance prediction [1] - The platform provides comprehensive simulations for atomic-level manufacturing equipment, including external control parameters and device geometries, ultimately saving development time and improving efficiency [1] Group 2: Economic Impact - The technology has been applied in several companies, including Tuojing Technology and Huawei, achieving a 15% reduction in economic costs and a 20% reduction in time costs compared to similar foreign products [1] Group 3: Educational Collaboration - The collaboration between the research team and leading domestic enterprises has led to the establishment of joint laboratories, enabling students to participate in technology development projects during their studies, thus fostering the cultivation of high-level talent in the industry [1] Group 4: Government Support - Liaoning Province has identified atomic-level manufacturing as a key focus for future industries, organizing promotional activities and establishing a technology plan to support foundational research and cutting-edge breakthroughs in this area [1]
我国研发首款等离子体工艺腔室仿真平台
Ke Ji Ri Bao· 2026-01-15 14:23
Core Viewpoint - The development of the first domestically produced plasma process chamber simulation platform (MAPS) by Dalian University of Technology represents a significant advancement in atomic-level manufacturing technology, addressing existing technical bottlenecks in the industry [1] Group 1: Technology Development - MAPS can simulate atomic-level manufacturing equipment comprehensively, including external control parameters and device geometric structures, leading to reduced development time and improved efficiency [1] - The technology has been applied in several integrated circuit equipment companies, including Tuojing Technology and Huawei, achieving a 15% reduction in economic costs and a 20% reduction in time costs compared to similar foreign products [1] Group 2: Industry Collaboration - The research team collaborates with leading domestic enterprises to establish joint laboratories, allowing students to participate in technology development projects during their studies, thereby cultivating high-level talent for the industry [1] Group 3: Government Support - Liaoning Province has identified atomic-level manufacturing as a key focus for future industries, organizing promotional activities and establishing a technology plan to support foundational research and cutting-edge breakthroughs in this area [1] - The provincial government aims to accelerate the development of "root technologies" to facilitate industrial advancement and achieve a "leapfrog" development strategy [1]