电子束曝光机凭借其超高分辨率和无需掩模版的直写优势，是集成电路制造中纳米级图形化的关键装 备，广泛应用于前沿工艺研发、第三代半导体、先进封装、微机电系统（MEMS）及光子芯片等高端领 域。但由于其涉及多学科尖端技术融合，长期被国外公司垄断，实现该技术的自主可控对我国半导体产 业链的安全与升级具有至关重要的战略意义。 千乘资本多年来重点围绕工业科技进行布局。千乘资本投资团队认为，半导体装备国产化是产业核心趋 势，精电光科团队兼具技术前瞻性与执行力，其产品布局直击行业痛点，非常看好公司成为细分领域领 军者。 半导体装备领域初创企业精电光科（泉州）半导体设备有限公司（简称 "精电光科"）近日透露，公司 已完成数千万元Pre-A轮融资，千乘资本领投，元禾原点，融玥投资跟投。 元禾原点投资团队认为，电子束曝光设备在半导体产业链条中处于非常核心的位置，技术难度高且急需 国产化，精电光科团队已在电子束领域攻坚近二十年，工程化经验丰富，并持续保持着积极的开拓精 神，元禾原点非常看好精电光科在该细分领域后续完成突破性的发展，补强国内半导体产业链。 精电光科由原国内知名电子显微镜企业聚束科技的CEO何伟领衔创立,核心团队来自于H ...

Core Viewpoint - MicroGuide Nano has successfully developed the first domestically produced High-k ALD equipment, addressing critical challenges in the semiconductor industry and contributing to the self-sufficiency of China's semiconductor sector [1] Group 1: Product Development - The High-k ALD equipment has been successfully applied in the front-end production line of integrated circuit manufacturing, overcoming key process node challenges [1] - The company has made significant advancements in CVD equipment, becoming one of the first domestic enterprises to develop hard mask chemical vapor deposition (CVD) equipment [1] Group 2: Industry Impact - The core technology of the company has achieved multi-domain coverage, precisely adapting to key application scenarios in logic chips, memory chips, advanced packaging, compound semiconductors, and new display technologies [1] - The company continues to focus on advanced process film technology solutions for semiconductors, leading the development of new architectures and devices, and addressing the demand for next-generation technology iterations in China's advanced semiconductor industry [1]