极紫外光刻胶
Search documents
国内团队称破解芯片光刻缺陷难题
第一财经· 2025-10-27 09:43
2025.10. 27 本文字数:2502,阅读时长大约4分钟 作者 | 第一财经 郑栩彤 10月27日,多只光刻胶概念股飘红,收盘万润股份涨停,晶瑞电材涨超16%,艾森股份涨超6%, 南大光电涨超5%,彤程新材涨超4%。消息面上,国内研究团队在光刻胶领域取得了新的研究突 破。 近日,北京大学化学与分子工程学院彭海琳教授团队及合作者撰写的一篇论文发表在《自然·通讯》 上,引起了广泛关注。这篇论文将冷冻电子断层扫描技术(Cryo-ET)引入半导体领域,通过该技 术在原位状态下解析了光刻胶分子在液相环境中的微观三维结构、界面分布与缠结行为,并指导开发 出可显著减少光刻缺陷的产业化方案。该论文提出的方案,能使光刻技术在减少图案缺陷方面取得大 于99%的改进。 在接受第一财经记者采访时,彭海琳表示,该研究成果可直接用于半导体制造,技术方案可行,与现 有的装备兼容。 显著减少光刻缺陷 光刻胶即光致抗蚀剂,是半导体光刻过程中一种关键材料,在光刻工艺过程中用作抗腐蚀涂层材料。 简单理解,光刻是利用光和光刻胶之间的化学反应,采用深紫外光、极紫外光等将掩膜上的图案转移 到硅晶圆上。光刻胶显影是通过显影液溶解曝光后光刻胶可溶解区 ...
前瞻全球产业早报:国家育儿补贴方案公布
Qian Zhan Wang· 2025-07-29 12:29
Group 1: National Policies and Initiatives - The national childcare subsidy program was announced, providing 3,600 yuan per child per year for infants under three years old starting from January 1, 2025 [2] - Shanghai is supporting innovation in key areas such as general artificial intelligence and smart chips, with funding up to 50 million yuan for strategic projects [3] Group 2: Robotics and AI Developments - Yushun Technology's VP highlighted the "pseudo-intelligence" dilemma faced by humanoid robots, citing issues like fragmented environmental perception and lack of coherent action [3] - Ant Financial released a financial reasoning model, Agentar-Fin-R1, which surpasses other models in financial evaluations [7] - JD.com announced the launch of the first 100% open-source enterprise-level intelligent agent, JoyAgent, enhancing model efficiency and reducing training costs significantly [7] Group 3: Automotive Industry Insights - The China Automobile Association organized a seminar on building a unified automotive market, focusing on digitalizing the entire automotive consumption process [5][6] Group 4: Semiconductor and Material Innovations - Tsinghua University developed a new type of extreme ultraviolet (EUV) photoresist material, providing new design strategies for advanced semiconductor manufacturing [8] Group 5: International Trade and Investment - The U.S. and EU reached a trade agreement, with the EU committing to increase investments in the U.S. by $600 billion [8] - Japan's recent investment commitment to the U.S. is expected to yield only 1-2% in actual investments, with the majority being loans [8] Group 6: Electric Vehicle Market Expansion - VinFast opened its first showroom in India as part of its strategy to establish a nationwide charging and after-sales service network [11]