半导体光刻技术
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今年上半年阿里云市场份额位居中国AI云市场第一|数智早参
Mei Ri Jing Ji Xin Wen· 2025-10-27 23:16
Group 1: AI Cloud Market - In the first half of 2025, Alibaba Cloud holds the largest market share in China's AI cloud market at 30.2%, while Baidu Smart Cloud follows with 22.5%, together exceeding 50% market share [1] - The report indicates a "dual-hero" competition in the Chinese AI cloud service market, highlighting the strong technological innovation and market expansion capabilities of both Alibaba Cloud and Baidu Smart Cloud [1] - The significant market potential and development space for AI cloud services in China are reflected in the competitive landscape [1] Group 2: Investment in Technology - Huawei's Hubble and other investors have acquired stakes in Wuhan Heart Electric Technology Co., increasing its registered capital from 2 million RMB to approximately 2.4 million RMB [2] - The investment is expected to help Wuhan Heart Electric Technology expand its market and enhance its technological capabilities, aligning with Huawei's needs for high-performance materials in next-generation communication technologies [2] Group 3: Semiconductor Technology - A research team from Peking University has published a paper introducing cryo-electron tomography (Cryo-ET) technology to the semiconductor field, significantly improving the understanding of photoresist molecular structures [3] - The proposed solution from the research can achieve over 99% improvement in reducing pattern defects in lithography technology [3] - This advancement is seen as a motivation for domestic researchers and companies to increase investment in semiconductor technology development and innovation [3]
国内团队称破解芯片光刻缺陷难题
第一财经· 2025-10-27 09:43
Core Viewpoint - Recent breakthroughs in photoresist technology by a research team from Peking University have led to significant improvements in semiconductor manufacturing, particularly in reducing pattern defects by over 99% [3][7]. Group 1: Research Breakthroughs - The research team, led by Professor Peng Hailin, published a paper in *Nature Communications* introducing Cryo-electron tomography (Cryo-ET) to analyze the micro-3D structure of photoresist molecules in liquid environments [3][6]. - The study revealed that controlling the entanglement of polymer chains in photoresist during the development process is crucial for minimizing surface defects [6][7]. - By increasing the post-exposure bake (PEB) temperature to 105°C, the polymer chains tend to disentangle, which helps reduce defects on 12-inch wafers [6][7]. Group 2: Industry Implications - The global semiconductor photoresist market is projected to grow from approximately $2.685 billion in 2024 to $4.547 billion by 2031, indicating a strong demand for advanced photoresist materials [11]. - Major players in the photoresist market include Tokyo Ohka Kogyo, JSR, and Shin-Etsu Chemical, with the top five companies holding about 86% of the market share as of 2023 [11]. - Domestic companies are making strides in mid-to-low-end products and are investing in the development of EUV photoresists to enhance local production capabilities [11]. Group 3: Future Directions - There is a need for interdisciplinary collaboration between industry and academia to further reduce manufacturing defects in semiconductor production [10][11]. - The research community is encouraged to focus on EUV photoresist technology to catch up with international advancements, as domestic researchers are currently in a position of catching up [11].
突破!国产DUV光源技术!3nm!
国芯网· 2025-03-25 04:46
Core Viewpoint - The Chinese Academy of Sciences has successfully developed a solid-state DUV (Deep Ultraviolet) laser that emits coherent light at 193nm, aligning with the current mainstream DUV exposure wavelength, potentially advancing domestic semiconductor processes to the 3nm node [4]. Group 1: Technology Development - The research team published their findings in the International Society for Optical Engineering, showcasing a solid-state DUV laser source that theoretically supports semiconductor manufacturing processes down to the 3nm node, paving the way for domestic photolithography technology [4]. - The new solid-state laser technology utilizes a Yb:YAG crystal amplifier as the core light source, employing a technique of splitting, frequency conversion, and synthesis to achieve laser output in a fully solid-state structure [5]. Group 2: Comparison with Existing Technologies - Current global photolithography giants like ASML, Nikon, and Canon rely on gas laser technology, specifically fluorine excimer lasers, which require continuous injection of argon-fluorine gas and operate under high-pressure electric fields, making their systems complex and energy-intensive [4][5]. - The solid-state design eliminates the dependency on rare gases, theoretically allowing for a reduction in the size of photolithography systems by over 30% [5]. Group 3: Performance and Future Prospects - The average power output of the new technology is currently 70mW with a frequency of 6kHz, which is only 1% of traditional systems, indicating that there is significant room for improvement [5]. - Achieving breakthroughs in power density and frequency stability could potentially alter the existing technological landscape of DUV photolithography equipment [5]. - The paper acknowledges that there is still a significant gap between the laboratory prototype and industrial applications, necessitating collaborative efforts in materials science and precision manufacturing [5].