半导体光刻技术
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今年上半年阿里云市场份额位居中国AI云市场第一|数智早参
Mei Ri Jing Ji Xin Wen· 2025-10-27 23:16
Group 1: AI Cloud Market - In the first half of 2025, Alibaba Cloud holds the largest market share in China's AI cloud market at 30.2%, while Baidu Smart Cloud follows with 22.5%, together exceeding 50% market share [1] - The report indicates a "dual-hero" competition in the Chinese AI cloud service market, highlighting the strong technological innovation and market expansion capabilities of both Alibaba Cloud and Baidu Smart Cloud [1] - The significant market potential and development space for AI cloud services in China are reflected in the competitive landscape [1] Group 2: Investment in Technology - Huawei's Hubble and other investors have acquired stakes in Wuhan Heart Electric Technology Co., increasing its registered capital from 2 million RMB to approximately 2.4 million RMB [2] - The investment is expected to help Wuhan Heart Electric Technology expand its market and enhance its technological capabilities, aligning with Huawei's needs for high-performance materials in next-generation communication technologies [2] Group 3: Semiconductor Technology - A research team from Peking University has published a paper introducing cryo-electron tomography (Cryo-ET) technology to the semiconductor field, significantly improving the understanding of photoresist molecular structures [3] - The proposed solution from the research can achieve over 99% improvement in reducing pattern defects in lithography technology [3] - This advancement is seen as a motivation for domestic researchers and companies to increase investment in semiconductor technology development and innovation [3]
国内团队称破解芯片光刻缺陷难题
第一财经· 2025-10-27 09:43
2025.10. 27 本文字数:2502,阅读时长大约4分钟 作者 | 第一财经 郑栩彤 10月27日,多只光刻胶概念股飘红,收盘万润股份涨停,晶瑞电材涨超16%,艾森股份涨超6%, 南大光电涨超5%,彤程新材涨超4%。消息面上,国内研究团队在光刻胶领域取得了新的研究突 破。 近日,北京大学化学与分子工程学院彭海琳教授团队及合作者撰写的一篇论文发表在《自然·通讯》 上,引起了广泛关注。这篇论文将冷冻电子断层扫描技术(Cryo-ET)引入半导体领域,通过该技 术在原位状态下解析了光刻胶分子在液相环境中的微观三维结构、界面分布与缠结行为,并指导开发 出可显著减少光刻缺陷的产业化方案。该论文提出的方案,能使光刻技术在减少图案缺陷方面取得大 于99%的改进。 在接受第一财经记者采访时,彭海琳表示,该研究成果可直接用于半导体制造,技术方案可行,与现 有的装备兼容。 显著减少光刻缺陷 光刻胶即光致抗蚀剂,是半导体光刻过程中一种关键材料,在光刻工艺过程中用作抗腐蚀涂层材料。 简单理解,光刻是利用光和光刻胶之间的化学反应,采用深紫外光、极紫外光等将掩膜上的图案转移 到硅晶圆上。光刻胶显影是通过显影液溶解曝光后光刻胶可溶解区 ...
突破!国产DUV光源技术!3nm!
国芯网· 2025-03-25 04:46
Core Viewpoint - The Chinese Academy of Sciences has successfully developed a solid-state DUV (Deep Ultraviolet) laser that emits coherent light at 193nm, aligning with the current mainstream DUV exposure wavelength, potentially advancing domestic semiconductor processes to the 3nm node [4]. Group 1: Technology Development - The research team published their findings in the International Society for Optical Engineering, showcasing a solid-state DUV laser source that theoretically supports semiconductor manufacturing processes down to the 3nm node, paving the way for domestic photolithography technology [4]. - The new solid-state laser technology utilizes a Yb:YAG crystal amplifier as the core light source, employing a technique of splitting, frequency conversion, and synthesis to achieve laser output in a fully solid-state structure [5]. Group 2: Comparison with Existing Technologies - Current global photolithography giants like ASML, Nikon, and Canon rely on gas laser technology, specifically fluorine excimer lasers, which require continuous injection of argon-fluorine gas and operate under high-pressure electric fields, making their systems complex and energy-intensive [4][5]. - The solid-state design eliminates the dependency on rare gases, theoretically allowing for a reduction in the size of photolithography systems by over 30% [5]. Group 3: Performance and Future Prospects - The average power output of the new technology is currently 70mW with a frequency of 6kHz, which is only 1% of traditional systems, indicating that there is significant room for improvement [5]. - Achieving breakthroughs in power density and frequency stability could potentially alter the existing technological landscape of DUV photolithography equipment [5]. - The paper acknowledges that there is still a significant gap between the laboratory prototype and industrial applications, necessitating collaborative efforts in materials science and precision manufacturing [5].