基于聚碲氧烷的新型光刻胶

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前瞻全球产业早报:国家育儿补贴方案公布
Qian Zhan Wang· 2025-07-29 12:29
Group 1: National Policies and Initiatives - The national childcare subsidy program was announced, providing 3,600 yuan per child per year for infants under three years old starting from January 1, 2025 [2] - Shanghai is supporting innovation in key areas such as general artificial intelligence and smart chips, with funding up to 50 million yuan for strategic projects [3] Group 2: Robotics and AI Developments - Yushun Technology's VP highlighted the "pseudo-intelligence" dilemma faced by humanoid robots, citing issues like fragmented environmental perception and lack of coherent action [3] - Ant Financial released a financial reasoning model, Agentar-Fin-R1, which surpasses other models in financial evaluations [7] - JD.com announced the launch of the first 100% open-source enterprise-level intelligent agent, JoyAgent, enhancing model efficiency and reducing training costs significantly [7] Group 3: Automotive Industry Insights - The China Automobile Association organized a seminar on building a unified automotive market, focusing on digitalizing the entire automotive consumption process [5][6] Group 4: Semiconductor and Material Innovations - Tsinghua University developed a new type of extreme ultraviolet (EUV) photoresist material, providing new design strategies for advanced semiconductor manufacturing [8] Group 5: International Trade and Investment - The U.S. and EU reached a trade agreement, with the EU committing to increase investments in the U.S. by $600 billion [8] - Japan's recent investment commitment to the U.S. is expected to yield only 1-2% in actual investments, with the majority being loans [8] Group 6: Electric Vehicle Market Expansion - VinFast opened its first showroom in India as part of its strategy to establish a nationwide charging and after-sales service network [11]
清华大学EUV材料重大进展!
国芯网· 2025-07-25 14:34
国芯网[原:中国半导体论坛] 振兴国产半导体产业! 不拘中国、 放眼世界 ! 关注 世界半导体论坛 ↓ ↓ ↓ 7月25日消息,据报道,清华大学化学系许华平教授团队在极紫外(EUV)光刻材料上取得重要进展,开发出一种基于聚 碲氧烷的新型光刻胶,为先进半导体制造中的关键材料提供了新的设计策略。 这一光刻胶由单组分小分子聚合而成,在简洁设计下整合理想特性,为下一代EUV光刻胶的开发提供了可行路径。 光刻胶市场在半导体升级、国产替代及新兴技术驱动下,将保持高速增长。中国有望通过技术突破与政策支持,从"进口依 赖"转向"全球主导"。中国"十四五"规划将光刻胶列为关键材料,税收优惠及研发补贴超200亿元,推动国内相关企业实现 ArF光刻胶量产。 许华平教授课题组基于团队早期发明的聚碲氧烷开发出一种全新的EUV光刻胶,满足了上述理想光刻胶的条 件。在该项研究中,团队将高EUV吸收元素碲(Te)通过Te─O键直接引入高分子骨架中。碲具有除惰性气体 元素氙(Xe)、氡(Rn)和放射性元素砹(At)之外最高的EUV吸收截面,EUV吸收能力远高于传统光刻胶 中的短周期元素和Zn、Zr、Hf和Sn等金属元素,显著提升了光刻胶的EU ...