Core Viewpoint - The successful delivery of the first PL-SR series inkjet step nanoimprint equipment by Pulin Technology marks a significant milestone in the company's expansion and market penetration in the high-end semiconductor equipment manufacturing sector [1]. Technical Background - The step-and-flash nanoimprint lithography technology, suitable for integrated circuit manufacturing, was innovatively developed by Grant Wilson's team and later commercialized by Canon after acquiring Molecular Imprint Inc. in 2014 [3]. - Canon announced the commercialization of nanoimprint technology in NAND flash memory manufacturing in 2023, with plans to extend it to DRAM and logic chips [3]. Equipment Features - The PL-SR series equipment has overcome key technical challenges such as non-vacuum complete bonding of hard plates, spray coating, and control of residual layers, enabling it to achieve a linewidth of less than 10nm in nanoimprint lithography [7][10]. - The equipment features a self-developed template surface control system, inkjet algorithm system, and software control system, and has completed initial verification for various chip applications [7][10]. Technical Achievements - The PL-SR series has achieved significant breakthroughs in spray-type nanoimprint materials, with an average residual layer thickness of less than 10nm and a variation of less than 2nm, meeting high technical standards [10]. - The company has developed a solvent-cleanable light-curing nanoimprint material to mitigate the risk of contamination from expensive quartz templates [10]. Industry Challenges - The step nanoimprint technology requires extremely high precision and cleanliness, with alignment accuracy needing to break below 10nm, posing challenges comparable to those faced by EUV equipment [18]. - Pulin Technology emphasizes the need for collaboration with domestic research institutions and enterprises to enhance capabilities in precision alignment technology [18]. Company Overview - Pulin Technology is a high-end micro-nano manufacturer with core independent intellectual property rights, focusing on the research, manufacturing, and sales of nanoimprint equipment and materials [22]. - The company has applied for 50 invention patents and has received multiple honors, including recognition as a national high-tech enterprise [22].