CMP研磨液

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芯片的“打磨师傅”:CMP
半导体芯闻· 2025-08-04 10:37
Core Viewpoint - CMP (Chemical Mechanical Polishing) is a crucial process in semiconductor manufacturing that ensures the smoothness of wafer surfaces, enabling the successful fabrication of advanced chips [2][4]. Group 1: CMP Process Overview - CMP plays a vital role in various stages of chip manufacturing, including the planarization of insulating layers, metal layers, and transitions between multiple layers [4]. - The process involves placing the wafer on a polishing pad, where a specialized slurry is applied to achieve a smooth surface through chemical reactions and mechanical polishing [2][4]. Group 2: Importance of Slurry - The quality of the slurry is essential for achieving a smooth wafer surface, with different types of slurries used based on the wafer material and desired planarization effect [4]. - Major suppliers of high-end CMP slurries include companies like Cabot Microelectronics, DuPont, Fujimi, and Showa Denko, indicating a reliance on international firms for these critical materials [4]. Group 3: Types of Abrasives - Abrasives in CMP slurries can be categorized into three main types: silica-based, alumina-based, and ceria-based, each with distinct properties affecting the polishing process [5][6]. - The shape and hardness of these abrasives influence the material removal selectivity, impacting the overall polishing precision and surface quality [6]. Group 4: Challenges and Innovations - CMP faces challenges such as the risk of damaging circuits through excessive polishing or insufficient planarization, especially as manufacturing processes advance to the nanoscale [6]. - The industry is actively developing gentler slurries, new polishing pads, and AI monitoring systems to enhance the precision and stability of the CMP process, adapting to future manufacturing needs [6].
电子化学品国产化正当时
Zhong Guo Hua Gong Bao· 2025-06-13 03:06
Core Viewpoint - The electronic chemicals industry in China is experiencing significant advancements in domestic production capabilities, particularly in high-end products, driven by policy support and market demand, while still facing challenges in certain areas of technology and material sourcing [2][3][4]. Group 1: Industry Development - The domestic production rate of electronic chemicals has increased, with notable progress in photoresists and wet electronic chemicals, although high-end products still rely heavily on imports [3]. - Companies like Nanda Optoelectronics and Tongcheng Electronics have achieved breakthroughs in the research and production of KrF and ArF photoresists, leading to substantial increases in revenue and profit [3]. - The overall domestic production rate for wet electronic chemicals is around 50%, but advanced processes below 28nm still depend on imports [3]. Group 2: Green and Intelligent Transformation - The industry is shifting towards green and intelligent production methods, with innovations such as Intel's chemical recycling network and Sumitomo Chemical's low-temperature vacuum distillation technology for photoresist recovery [4][5]. - New technologies are being developed to reduce energy consumption in the production of high-purity chemicals, which accounts for approximately 60% of chemical energy consumption [4]. Group 3: Collaborative Innovation and Industry Clusters - The electronic chemicals industry exhibits clear clustering characteristics, with regions like the Yangtze River Delta forming alliances to enhance collaboration between upstream and downstream sectors [6][7]. - Shanghai is taking strategic steps to address critical challenges in electronic chemicals, while Jiangsu and Zhejiang are nurturing strong leading enterprises in photoresists and wet electronic chemicals [7]. - Internationally, regions like Germany are also demonstrating industrial clustering through integrated production and resource recycling initiatives [7].