9月24日，A股三大指数震荡上行，半导体设备板块领涨市场。 相关ETF方面，截至发稿，科创半导体设备ETF（588710）涨9.81%，现居全市场涨幅榜前五，成交额 超2.57亿元。成分股中，神工股份涨停，盛美上海、华海清科、安集科技等多股跟涨。 华鑫证券表示，在国家政策支持下，国内企业加速研发突破光刻机制造技术，目前国产光刻机在 90nm 及以下工艺节点方面取得了重要进展。例如，上海微电子自主研发的 600系列光刻机已实现 90nm 工艺 的量产，并正在进行 28nm 浸没式光刻机的研发工作。近期，宇量昇与中芯国际的合作测试是国产光刻 机突破的重要信号。随着光刻机技术的突破将带动上游材料、精密机械等配套产业升级，加速光刻胶、 光学部件等 "卡脖子" 材料的国产化进程，形成 "龙头带动、多点突破"的产业升级格局。 （本文机构观点来自持牌证券机构，不构成任何投资建议，亦不代表平台观点，请投资人独立判断和决 策。） 科创半导体设备ETF（588710）跟踪上证科创板半导体材料设备主题指数，该指数选取科创板内业务涉 及半导体材料和半导体设备等领域的上市公司证券作为指数样本，以反映科创板半导体材料和设备上市 公司证券 ...

Core Viewpoint - The domestic photolithography machine localization process in China is accelerating, with significant breakthroughs showcased at the 25th China International Industry Fair, including the debut of EUV lithography machine parameters by Shanghai Micro Electronics [2][4]. Industry Developments - Shanghai Micro Electronics and Chip-on-Micro showcased major products, indicating a "0-1" breakthrough in the industry, with advanced packaging machines entering mass production and domestic EUV machines in the principle machine construction phase [4]. - Domestic photolithography machines have made significant progress in 90nm and below process nodes, with Shanghai Micro Electronics' 600 series achieving mass production at 90nm and ongoing development of 28nm immersion lithography machines [4]. - The breakthrough in photolithography technology is expected to drive upgrades in upstream materials and precision machinery, accelerating the localization of critical materials like photoresists and optical components [4]. Market Performance - The photolithography concept stocks have surged, with Zhangjiang Hi-Tech (600895) hitting a historical high [2][5][6]. - Companies like Chip-on-Micro and Jiangfeng Electronics are projected to see net profit growth rates exceeding 20% in 2026 and 2027, while others like Fuchuang Precision and Tongfei Co. are expected to exceed 30% [7][10]. Investment Trends - Over 40 photolithography concept stocks are present in the A-share market, with significant institutional interest in companies like Chip-on-Micro, Jiangfeng Electronics, and Fuchuang Precision [7]. - Leveraged funds have shown strong interest in stocks such as Tengjing Technology and Chip-on-Micro, with net purchases exceeding 100 million yuan since September [8].