点击 最 下方 关注《材料汇》 ， 点击"❤"和" "并分享 添加 小编微信 ，寻 志同道合 的你 正文 芯上微装 根据行业调研信息， 近期芯上微装前道500nm-i线光刻机已发货至核心头部fab厂客户端进行量产验证 ，供应链i线物镜系统配套价值量从300w提升至500-600w。 上海微电子 SSA600/20系列是目前国内最先进、也是唯一可量产的前道光刻机， 分辨率达到90nm 。主要用于成熟制程（如90nm及以上节点）的芯片制造。 SMEE正在全力攻关 28nm节点的沉浸式（ArF液浸）光刻机， 这是当前国产光刻机技术攻关的 核心目标 。 根据公开报道和行业消息，28nm光刻机的研发已进入后期阶段， 核心子系统取得突破，样机组装和测试正在进行中 。官方曾提出目标是在 2024-2025年完成首台交 付 （实际进度可能受测试验证、良率提升等因素影响）。 国内XX装备集团 IC前道光刻机： 聚焦365nm i-line光刻机（分辨率约0.35μm），用于功率半导体、MEMS等特殊工艺。同时， 正在推进KrF光刻机（248nm）研发，目标突破55nm 节点。 新凯来 来源：《新凯来： " 中国版阿斯麦 " 改 ...

Investment Rating - The report maintains an investment rating of "A" for the electronic industry, indicating a positive outlook for the sector [1]. Core Insights - The report emphasizes the critical role of lithography machines in semiconductor manufacturing, highlighting their complexity and high costs. The global lithography machine market is projected to reach approximately $31.5 billion by 2024, with ASML dominating the market [4][33][38]. - The report discusses the urgent need for domestic lithography machine production in China due to increasing U.S. export controls on semiconductor technology, which has created a "bottleneck" for the domestic chip manufacturing industry [5][42][57]. Summary by Sections Lithography Machines - Lithography is identified as a key process in chip manufacturing, with lithography machines being the core equipment. The manufacturing process includes several steps, with lithography being the most complex and time-consuming [3][13]. - The report outlines the evolution of lithography technology, including the transition from mask-based lithography to projection lithography, which is becoming the mainstream technology in chip manufacturing [15][21]. - The report details the advancements in lithography machine resolution, driven by shorter wavelengths and increased numerical aperture, with EUV technology achieving resolutions as low as 8nm [24][27][32]. Market Dynamics - The global lithography machine market is estimated to exceed $31.5 billion, with ASML holding a dominant market share of approximately 82.1% as of 2022. The market is characterized by an oligopolistic structure, with ASML, Canon, and Nikon being the primary players [33][38][40]. - The report highlights the increasing demand for lithography machines driven by the expansion of domestic wafer fabrication plants in China, which are expected to increase their monthly production capacity significantly by 2026 [42][47]. Investment Recommendations - The report suggests focusing on companies involved in the lithography machine supply chain, including Maolai Optical, Fuguang Co., Huicheng Vacuum, Inno Laser, and others, as potential investment opportunities [5][42].