中微半导体设备（上海）股份有限公司 2025年度业绩快报公告 本公司董事会及全体董事保证本公告内容不存在任何虚假记载、误导性陈述或者重大遗漏，并对其内容 的真实性、准确性和完整性依法承担法律责任。 重要内容提示： 登录新浪财经APP 搜索【信披】查看更多考评等级 证券代码：688012 证券简称：中微公司 公告编号：2026-014 ● 中微半导体设备（上海）股份有限公司（以下简称"公司"）2025年营业收入约123.85亿元，较2024年 增加约33.19亿元，同比增长约36.62%。 ● 根据市场需求，公司加大研发力度，新产品数量快速增加。2025年全年公司研发投入约37.44亿元， 较2024年增长12.91亿元（增长约52.65%），研发投入占公司营业收入比例约为30.23%。 ● 公司预计2025年度实现归属于母公司所有者的净利润约为21.11亿元，与上年同期（法定披露数据） 相比，增加约4.96亿元，同比增加约30.69%。 ● 公司2025年度实现归属于母公司所有者的扣除非经常性损益的净利润约为15.50亿元，与上年同期 （法定披露数据）相比，增加约1.62亿元，同比增加约11.64%。 ● 公 ...

到2025年底，公司累计已有超过7,800个反应台在国内外170余条客户芯片及LED生产线全面量产，其中 刻蚀设备反应台全球累计出货超过6,800台。公司的CDP产品部门为先进存储器件和逻辑器件开发的 LPCVD,ALD等十多款导体和介质薄膜设备已经顺利进入市场，并且设备性能完全达到国际领先水平， 薄膜设备的覆盖率不断增加。公司EPI设备研发团队已经开发出具有自主知识产权及创新的平台，目前 减压EPI设备已付运成熟制程客户进行量产验证，该种设备同时也付运至先进制程客户进行验证，部分 先进工艺已进入量产验证阶段;新一代高选择比预清洁腔体满足先进工艺的需求，已在客户端进行量产 验证;常压外延设备现已完成开发，进入工艺验证阶段。在泛半导体设备领域，公司正在开发更多化合 物半导体外延设备，已陆续付运至客户端进行验证。 公告显示，公司针对先进逻辑和存储器件制造中关键刻蚀工艺的高端产品新增付运量显著提升，先进逻 辑器件中段关键刻蚀工艺和先进存储器件的超高深宽比刻蚀工艺实现了稳定可靠的大规模量产。其中 CCP方面，公司用于关键刻蚀工艺的单反应台介质刻蚀产品保持高速增长，能够全面覆盖存储器刻蚀应 用中各类超高深宽比需求;IC ...

公告显示，公司针对先进逻辑和存储器件制造中关键刻蚀工艺的高端产品新增付运量显著提升，先进逻 辑器件中段关键刻蚀工艺和先进存储器件的超高深宽比刻蚀工艺实现了稳定可靠的大规模量产。其中 CCP方面，公司用于关键刻蚀工艺的单反应台介质刻蚀产品保持高速增长，能够全面覆盖存储器刻蚀应 用中各类超高深宽比需求;ICP方面，适用于下一代逻辑和存储客户用ICP刻蚀设备和化学气相刻蚀设备 开发取得了良好进展，加工的精度和重复性已达到单原子水平。 到2025年底，公司累计已有超过7,800个反应台在国内外170余条客户芯片及LED生产线全面量产，其中 刻蚀设备反应台全球累计出货超过6,800台。公司的CDP产品部门为先进存储器件和逻辑器件开发的 LPCVD,ALD等十多款导体和介质薄膜设备已经顺利进入市场，并且设备性能完全达到国际领先水平， 薄膜设备的覆盖率不断增加。公司EPI设备研发团队已经开发出具有自主知识产权及创新的平台，目前 减压EPI设备已付运成熟制程客户进行量产验证，该种设备同时也付运至先进制程客户进行验证，部分 先进工艺已进入量产验证阶段;新一代高选择比预清洁腔体满足先进工艺的需求，已在客户端进行量产 验证;常压外 ...

此外，中微公司在南昌约14万平方米的生产和研发基地、上海临港约18万平方米的生产和研发基地已经投入使用，保障了 公司销售快速增长。公司持续开发关键零部件供应商，推动供应链稳定、安全，设备交付率保持在较高水准，设备的及时交付 也为公司销售增长提供了有力支撑。 （编辑 郭之宸） 同时，该公司在新产品开发方面取得了显著成效，近两年新开发出十多种导体和介质薄膜设备，目前已有多款新型设备产 品进入市场，其中部分设备已获得重复性订单，LPCVD设备累计出货量突破三百个反应台，其他多个关键薄膜沉积设备研发 项目正在顺利推进；公司EPI设备已顺利进入客户端量产验证阶段。 公告显示，中微公司持续保持国际氮化镓基MOCVD设备市场领先地位，积极布局用于碳化硅和氮化镓基功率器件应用的 市场，并在Micro-LED和其他显示领域的专用MOCVD设备开发上取得了良好进展，几款MOCVD新产品进入客户端验证阶段。 公司新型八寸碳化硅外延设备、新型红黄光LED应用设备已付运至国内领先客户开展验证，目前进展顺利。 本报讯 （记者张文湘 见习记者占健宇）2月27日，中微半导体设备（上海）股份有限公司（以下简称"中微公司"）披露 2025年业绩 ...

Financial Performance - The company achieved total operating revenue of approximately 12.385 billion yuan in 2025, representing a year-on-year growth of 36.62% [1] - The net profit attributable to the parent company was approximately 2.111 billion yuan, with a year-on-year increase of 30.69% [1] - The net profit attributable to the parent company after deducting non-recurring gains and losses was approximately 1.550 billion yuan, reflecting a year-on-year growth of 11.64% [1] - Total assets at the end of the reporting period were approximately 29.772 billion yuan, an increase of 13.56% compared to the beginning of the year [1] - The equity attributable to the parent company was approximately 22.695 billion yuan, up 14.99% from the beginning of the year [1] Product Development and Sales - Sales of plasma etching equipment reached approximately 9.832 billion yuan, a year-on-year increase of 35.12% [1] - The company has developed over ten new types of conductor and dielectric film equipment in the past two years [1] - Sales of LPCVD and ALD equipment were approximately 506 million yuan, with a significant year-on-year growth of 224.23% [1][2] Market Position and R&D Investment - The company maintains a leading position in the international GaN-based MOCVD equipment market and is actively expanding into markets for SiC and GaN-based power device applications [2] - The company plans to increase R&D investment to approximately 3.744 billion yuan in 2025, a year-on-year increase of about 52.65% [2] - R&D expenses are projected to be 2.475 billion yuan, reflecting a year-on-year growth of approximately 74.61% [2] Capacity and Supply Chain Management - The company has operational production and R&D bases in Nanchang and Shanghai, totaling over 320,000 square meters, supporting rapid sales growth [3] - The company emphasizes the development of key component suppliers to ensure a stable and secure supply chain, maintaining a high equipment delivery rate [3] - Continuous innovation and differentiation in core technologies are prioritized, with enhanced operational management capabilities to control product costs and operational expenses effectively [3]

中微半导体设备以逾三成的营收增速和超过半百亿元的研发投入，强化了其在国产半导体设备领域的竞争地位。 27日，中微半导体设备发布2025年度业绩快报：全年营业收入约123.85亿元，同比增长约36.62%；归属于母公司所有者的净利润约21.11亿元，同 比增加约30.69%。公司同期大幅加码研发，全年研发投入约37.44亿元，同比增长约52.65%，占营业收入比例达30.23%。 在营收高增长的同时，公司主动选择以牺牲短期利润换取技术积累。2025年研发费用达24.75亿元，同比增长约74.61%；研发总投入约37.44亿 元，同比增长约52.65%，占营收比例约30.23%，公司称远高于科创板均值。 公司在公告中将研发投入大幅增加列为净利润增速低于营收增速的主要原因之一。尽管营收增长带来毛利增量约11.28亿元，但研发费用同期增长 约10.58亿元，几乎将毛利增量抵消殆尽，从而压低了经营利润的弹性。 业绩增长由核心刻蚀设备的规模扩张与新品类的快速放量共同驱动。其中，LPCVD和ALD薄膜设备销售额约5.06亿元，同比增长约224.23%，增 速远超刻蚀主业。公司同时披露，ICP刻蚀设备的加工精度和重复性已达到 ...

Core Viewpoint - The company anticipates significant growth in revenue and net profit for the year 2025, driven by increased demand for semiconductor equipment and substantial investment in research and development [1][5][9]. Group 1: Financial Performance Forecast - The company expects a revenue of approximately 12.385 billion yuan for 2025, an increase of about 3.319 billion yuan from 2024, representing a year-on-year growth of approximately 36.62% [1][5]. - The projected net profit attributable to the parent company for 2025 is estimated to be between 2.08 billion yuan and 2.18 billion yuan, an increase of 464 million to 564 million yuan compared to the previous year, reflecting a year-on-year growth of approximately 28.74% to 34.93% [1][5]. - The net profit attributable to the parent company after deducting non-recurring gains and losses is expected to be between 1.5 billion yuan and 1.6 billion yuan, an increase of 112 million to 212 million yuan compared to the previous year, which corresponds to a year-on-year increase of approximately 8.06% to 15.26% [2][5]. Group 2: Research and Development Investment - The company plans to invest approximately 3.736 billion yuan in research and development for 2025, an increase of 1.283 billion yuan from 2024, representing a growth of about 52.32% [1][9]. - The R&D investment will account for approximately 30.16% of the company's revenue, significantly higher than the average for companies listed on the Sci-Tech Innovation Board [9]. Group 3: Product Development and Market Position - The company has seen a significant increase in the shipment of high-end products for critical etching processes in advanced logic and memory device manufacturing, achieving stable mass production of ultra-high aspect ratio etching processes [3][7]. - The company maintains a leading position in the international market for GaN-based MOCVD equipment and is actively developing specialized MOCVD equipment for applications in Micro-LED and other display fields [8]. - The company has successfully developed and shipped new equipment for silicon carbide epitaxy and LED applications, with several new products currently undergoing client validation [8].

Core Viewpoint - The company anticipates significant revenue growth for 2025, driven by strong demand for its semiconductor equipment, particularly plasma etching devices and new product developments [2][3][4] Revenue Forecast - The company expects 2025 revenue to be approximately 12.385 billion yuan, representing a year-on-year increase of about 36.62% [2] - Sales of etching equipment are projected to reach around 9.832 billion yuan, with a growth of approximately 35.12% [2] - Revenue from LPCVD and ALD semiconductor film equipment is expected to be 506 million yuan, showing a substantial increase of about 224.23% [2] - The anticipated net profit attributable to shareholders is estimated to be between 2.08 billion yuan and 2.18 billion yuan, reflecting a year-on-year growth of approximately 28.74% to 34.93% [2] - The net profit excluding non-recurring items is projected to be between 1.5 billion yuan and 1.6 billion yuan, indicating an increase of about 8.06% to 15.26% [2] Product Development - The company has successfully developed over ten new types of conductor and dielectric film equipment in the past two years, with several products already in the market and receiving repeat orders [3] - The cumulative shipment of LPCVD equipment has surpassed 300 reaction chambers, and multiple key film deposition equipment R&D projects are progressing smoothly [3] - The EPI equipment has entered the customer mass production verification stage [3] - The company maintains a leading position in the international GaN-based MOCVD equipment market and is actively expanding into markets for SiC and GaN-based power device applications [3] Production Capacity and R&D Investment - The company has operational production and R&D bases of approximately 140,000 square meters in Nanchang and 180,000 square meters in Shanghai, supporting rapid sales growth [4] - The company emphasizes innovation and differentiation, maintaining high levels of R&D investment, with 2025 R&D expenditure expected to be around 3.736 billion yuan, an increase of 1.283 billion yuan (approximately 52.32%) from the previous year [4] - R&D expenses are projected to be about 2.472 billion yuan, reflecting a growth of approximately 74.36% [4] - R&D investment is expected to account for about 30.16% of the company's revenue in 2025 [4]

Core Viewpoint - The company, Zhongwei Company (688012.SH), anticipates significant revenue and profit growth for 2025, driven by strong demand for its semiconductor equipment, particularly plasma etching devices and thin film deposition equipment [1][2]. Financial Projections - The company expects a revenue of approximately 12.385 billion yuan in 2025, an increase of about 3.319 billion yuan from 2024, representing a year-on-year growth of approximately 36.62% [1]. - Projected sales for etching equipment are around 9.832 billion yuan, reflecting a year-on-year growth of approximately 35.12% [1]. - Revenue from LPCVD and ALD semiconductor thin film equipment is expected to reach 506 million yuan, showing a substantial year-on-year increase of approximately 224.23% [1]. - The anticipated net profit attributable to the parent company for 2025 is estimated to be between 2.08 billion and 2.18 billion yuan, indicating a year-on-year growth of approximately 28.74% to 34.93% [1]. - The projected net profit, excluding non-recurring gains and losses, is expected to be between 1.5 billion and 1.6 billion yuan, reflecting an increase of approximately 8.06% to 15.26% year-on-year [1]. Product Development and Market Position - The company's plasma etching equipment is recognized as a core device in the semiconductor front-end market, characterized by a broad market space and high technical barriers [2]. - The company has seen a significant increase in the shipment volume of high-end products for critical etching processes in advanced logic and memory device manufacturing [2]. - The company has successfully developed over ten new types of conductor and dielectric thin film equipment in the past two years, with several new products already entering the market [2]. - Some of the new equipment has received repeat orders, and the cumulative shipment of LPCVD equipment has surpassed 300 reaction chambers [2]. - Ongoing research and development projects for multiple key thin film deposition equipment are progressing smoothly, and the EPI equipment has entered the client mass production verification phase [2].

Core Viewpoint - Zhongwei Semiconductor Equipment (Shanghai) Co., Ltd. expects a revenue growth of over 36% to 12.385 billion RMB in 2025, driven by strong sales of etching and film equipment [1] Group 1: Financial Performance - The company anticipates a net profit attributable to shareholders of 2.08 billion to 2.18 billion RMB in 2025, representing a year-on-year increase of approximately 28.74% to 34.93% [1] - Core net profit, excluding non-recurring gains and losses, is projected to be between 1.5 billion and 1.6 billion RMB, with a growth range of 8.06% to 15.26% [1] - The company expects a significant increase in non-recurring gains, with equity investment income estimated at 611 million RMB, up from 198 million RMB the previous year [3] Group 2: Business Growth and R&D Investment - The company plans to invest 3.736 billion RMB in R&D for 2025, a 52.32% increase from the previous year, which is significantly higher than the average for companies listed on the Sci-Tech Innovation Board [2] - The core plasma etching equipment continues to gain recognition from domestic and international clients, with cumulative shipments of etching equipment expected to exceed 6,800 units by the end of 2025 [2] - The film equipment business is experiencing explosive growth, with LPCVD and ALD equipment revenue reaching approximately 506 million RMB, a staggering increase of 224.23% [1][2] Group 3: Supply Chain and Production Capacity - The company has expanded its production and R&D bases in Nanchang and Shanghai, covering approximately 140,000 and 180,000 square meters, respectively [3] - To ensure stable equipment delivery rates, the company is actively developing key component suppliers to enhance supply chain security [3] Group 4: Technological Advancements - The company has made significant progress in the development of CCP and ICP equipment, achieving single-atom level precision in processing [2] - In the compound semiconductor sector, the company maintains a leading position in GaN-based MOCVD equipment and is actively developing SiC applications [4]