光刻技术

Search documents
更大的光罩,要来了?
半导体行业观察· 2025-06-29 01:51
Core Viewpoint - The article discusses the challenges and potential solutions related to high numerical aperture (NA) EUV lithography, particularly focusing on the issues of mask stitching and the implications of larger mask sizes on manufacturing efficiency and yield [1][2][9]. Group 1: Challenges of High NA EUV Lithography - The transition to high NA (0.55) EUV lithography presents significant challenges in circuit stitching between exposure fields, impacting design, yield, and manufacturability [1][2]. - The use of deformable optics in high NA systems reduces the exposure area of standard 6×6 inch masks by half, complicating the alignment and yield of critical layers [2][3]. - Misalignment at the stitching boundaries can lead to significant errors in critical dimensions, with a 2nm misalignment potentially causing at least a 10% error in pattern dimensions [2][3]. Group 2: Impact on Yield and Performance - The reliance on precise calibration in advanced lithography is crucial to avoid interference between features across different masks, which can lead to yield issues [3][4]. - The introduction of stitching-aware design strategies is necessary to mitigate performance degradation, with potential frequency reductions of up to 3% and increased power consumption by 3% in worst-case scenarios [5][6]. - Optimizations in design can reduce the impact of stitching on performance, with some strategies achieving a reduction in stitching area loss to below 0.5% and performance degradation to around 0.2% [6][8]. Group 3: Solutions and Industry Perspectives - Increasing the mask size to 6×11 inches could eliminate stitching issues and improve throughput, although it would significantly increase equipment costs and require extensive changes to existing manufacturing infrastructure [9][10]. - The production of larger masks poses additional challenges in stress management and defect control, which are already critical in EUV mask fabrication [10][11]. - Despite the technical advantages of larger masks, industry skepticism remains regarding the associated costs and the need for upgrades to meet future technology nodes [11].
光刻技术“神坛”崩了,巨头纷纷退货,“平替”杀来了!
Xin Lang Cai Jing· 2025-06-27 10:22
Group 1 - The semiconductor industry is experiencing a shift in focus from photolithography to etching technology, as major companies like Intel, TSMC, and Samsung are delaying the adoption of High-NA EUV lithography machines [1][6][10] - High-NA EUV, initially seen as a revolutionary technology capable of producing chips at 1nm and below, is now viewed as an expensive option that may not be necessary for current manufacturing processes [3][6][10] - The cost of High-NA EUV machines, approximately €378 million each, is a significant factor in companies' decisions to postpone their use, as existing technologies can achieve similar results at a lower cost [6][10] Group 2 - The role of etching technology has become increasingly important in chip manufacturing, especially as the industry moves towards 3D structures like GAAFET, which require precise etching rather than just fine lithography [8][12] - Companies are now focusing on maximizing the use of space in three-dimensional chip designs, shifting the competitive landscape from lithography precision to etching capabilities [8][12] - The stock prices of etching equipment manufacturers like Lam Research and Tokyo Electron have surged, indicating a growing demand for etching technology as the industry evolves [8][9] Group 3 - ASML's dominance in the lithography market is under pressure as the demand for High-NA EUV machines declines, leading to concerns about the sustainability of its business model [9][10] - The company reported selling 418 lithography machines in 2024, with a significant portion of revenue coming from China, highlighting the ongoing demand for DUV lithography in mature processes [9][10] - Emerging technologies, such as EUV-FEL and atomic lithography, pose potential threats to ASML's market position, as they may offer superior capabilities and lower costs in the future [11][12] Group 4 - The semiconductor industry's evolution reflects a broader trend away from reliance on a single technology, with a more diversified approach emerging that includes etching, new materials, and innovative architectures [12][14] - The industry is moving towards a model where multiple technologies coexist, reducing the previous over-reliance on photolithography as the sole solution for chip manufacturing [12][14] - The future of the semiconductor industry is likely to be characterized by a variety of competing technologies, rather than a single dominant player, indicating a more competitive and innovative landscape [14]
4家 PSPI 企业确认演讲,共探旭化成限供下的破局之道 | 2025势银(第五届)光刻产业大会(PRIC 2025)
势银芯链· 2025-06-26 03:46
Core Viewpoint - The article discusses the significance and market potential of Photosensitive Polyimide (PSPI) in the semiconductor industry, highlighting its advantages over traditional materials and the impact of supply chain disruptions caused by major suppliers like Asahi Kasei [1][2][3]. Market Overview - The global market for PSPI is projected to reach $402 million in 2024 and $802 million by 2030, indicating a strong growth trajectory [2]. - Major suppliers, including Toray, Fujifilm, HD Microsystems, Asahi Kasei, and SK Materials, dominate approximately 95% of the market, primarily serving processes below 28nm [2]. Supply Chain Disruption - Asahi Kasei announced supply adjustments for its PSPI product, leading to significant supply shortages for key semiconductor manufacturers such as TSMC and Samsung, which could severely impact their production plans [2]. Industry Challenges - The article emphasizes the conflict between the surging demand for AI computing power and the limited production capacity of PSPI, which is exacerbating supply chain issues [3]. Conference Insights - The 2025 TrendBank Lithography Industry Conference will address PSPI-related topics, featuring participation from various industry players, including Hubei Dinglong Advanced Materials and Bomi Technology [4]. Company Profiles - Hubei Dinglong focuses on semiconductor materials and has developed over 100 high-tech products, holding more than 1,000 patents [5]. - Bomi Technology specializes in polyimide materials and has achieved mass production of PSPI for integrated circuit packaging [8]. - Taiwan's Eternal Chemical has a strong emphasis on R&D, with over 190 patents and a commitment to high-tech chemical products [9]. - Weifang Xingtai Technology is dedicated to high-end photoresists and has developed a range of products that meet both domestic and international standards [10][11]. Conference Agenda - The conference will feature discussions on advanced lithography technologies, challenges in photoresist and wet electronic chemicals, and the current state of domestic lithography materials [22][23]. - Key topics include the development of self-assembly lithography techniques, advancements in photoresist technology, and the analysis of the Chinese mainland photoresist market [14]. Conference Details - The 2025 TrendBank Lithography Industry Conference is scheduled for July 9-10, 2025, in Hefei, Anhui, with an expected attendance of 300 participants [21][32].
展商推荐丨奥格:专注各类洁净搅拌罐/反应釜/系统集成服务商 | 2025势银(第五届)光刻产业大会(PRIC 2025)
势银芯链· 2025-06-26 03:46
Core Viewpoint - The article highlights the upcoming "2025 TrendBank Lithography Industry Conference" scheduled for July 9-10, 2025, in Hefei, Anhui, aiming to address challenges and advancements in the lithography technology sector, particularly in semiconductor manufacturing [12][24][25]. Company Overview - Hebei Auge Fluid Equipment Co., Ltd. specializes in the design and manufacturing of various clean mixing tanks, reactors, and system integration technologies, holding multiple certifications and qualifications [2][3]. - The company has been recognized as a high-tech enterprise and possesses various industry certifications, including pressure vessel design and manufacturing licenses [2]. Product Offerings - Auge's main products include clean mixing tanks/reactors, high-purity PFA tanks, EP reactors, heat exchangers, condensers, tubular reactors, and chemical turnover barrels, along with system integration technology design and engineering installation [3][5]. Conference Details - The "2025 TrendBank Lithography Industry Conference" will feature discussions on advanced lithography technologies, challenges in the lithography materials sector, and the development of high-end lithography equipment [15][24]. - The conference aims to foster collaboration among industry experts, researchers, and enterprises to enhance the lithography technology ecosystem and address supply chain challenges in the semiconductor industry [24][25]. Industry Challenges - The lithography industry in China faces significant challenges, including low self-sufficiency in high-end lithography materials, reliance on imports for certain chemicals, and technological gaps in high-precision mask manufacturing and lithography equipment [23][24]. - The geopolitical landscape has heightened the urgency for China to strengthen its capabilities in lithography technology and related industries to ensure supply chain security [24].
投资2.4亿元光引发剂项目获批,还有哪些企业在布局?
势银芯链· 2025-06-25 05:17
Core Viewpoint - The article discusses the development and investment in the UV photoinitiator industry in China, highlighting the establishment of new production projects and the competitive landscape among leading companies in the sector. Company Overview - Mudanjiang Sunrise New Materials Technology Co., Ltd. has initiated a project to produce 3,000 tons of photoinitiators and intermediates, with a total investment of 240 million yuan and a construction area of 5,000 square meters [3][4]. - The company, founded in July 2017, focuses on the research and production of high-performance UV photoinitiators and has established a technology research center in Heilongjiang Province [4]. Industry Landscape - The leading companies in the photoinitiator market include Jiurichuang, Qiangli New Materials, Wokailong, IGM, Yangfan New Materials, and Gurun Technology, with respective production capacities of 22,850 tons, 16,573 tons, and others [5][6]. - Jiurichuang is the largest producer, achieving a revenue of 1.488 billion yuan in 2024, with a year-on-year growth of 20.52% and a photoinitiator sales volume of 23,100 tons [6][7]. - Yangfan New Materials reported a revenue of 731 million yuan in 2024, with a year-on-year increase of 5.80%, although it faced challenges due to low operating rates [8][9]. - Qiangli New Materials generated 924 million yuan in revenue in 2024, with a year-on-year growth of 15.93%, but experienced a net profit loss of 182 million yuan [10][11]. Technological Advancements - Mudanjiang Sunrise has accumulated multiple patents in photoinitiator technology, indicating its strength in innovation [4]. - Gurun Technology has achieved significant growth in 2024, with a revenue increase of 35.21% and a net profit growth of 393.35%, showcasing its competitive edge in product performance [12][13]. Upcoming Events - The 2025 TrendBank (Fifth) Lithography Industry Conference will be held on July 9-10 in Hefei, aiming to gather experts and industry leaders to discuss advancements and challenges in lithography technology [15].
光刻技术,走下 “神坛”
Tai Mei Ti A P P· 2025-06-24 11:14
Core Viewpoint - The importance of photolithography in semiconductor manufacturing is being questioned, with industry leaders suggesting alternative technologies may reduce reliance on High-NA EUV lithography [1][8]. Group 1: High-NA EUV Lithography - High-NA EUV lithography machines are facing low demand, with many major chip manufacturers hesitant to fully adopt the technology due to high costs and alternative methods being developed [1][3]. - Intel has begun production using ASML's High-NA EUV machines, aiming to leverage this technology for its next-generation manufacturing processes, including Intel 18A (1.8nm) and Intel 14A (1.4nm) [4][6]. - TSMC has stated that it will not adopt High-NA EUV for its A16 (1.6nm) and A14 (1.4nm) processes, indicating that standard EUV machines will suffice until at least 2026 [5][6]. Group 2: Industry Trends and Shifts - Samsung and SK Hynix are delaying the implementation of High-NA EUV in DRAM production due to high costs and upcoming architectural changes in DRAM technology [6][7]. - The focus is shifting towards etching technology, which is becoming increasingly critical in semiconductor manufacturing, especially as advanced processes evolve below 3nm [7][9]. - The industry is exploring new transistor designs that may lessen the dependency on advanced lithography techniques, emphasizing the importance of etching processes instead [7][9]. Group 3: ASML's Market Position - ASML's EUV lithography technology dominates the market, controlling 75% to 80% of the EUV lithography market, contributing significantly to its revenue [10][13]. - In 2024, ASML reported a total of 418 lithography machine sales, including 44 EUV machines, with significant revenue contributions from the Chinese market [10][13]. - ASML is also developing the next generation Hyper NA EUV lithography system, which promises improved performance and efficiency [11][12]. Group 4: Emerging Technologies - New lithography technologies, such as EUV-FEL and atomic lithography, are being researched as potential alternatives to ASML's current EUV systems, which could disrupt the market [14][15][16]. - These emerging technologies aim to provide higher resolution and lower costs, posing a potential threat to ASML's market dominance [15][16].
潍坊星泰克 董事长 孙逊运确认演讲 | 2025势银(第五届)光刻产业大会(PRIC 2025)
势银芯链· 2025-06-24 03:40
Core Viewpoint - The 2025 TrendBank Lithography Industry Conference aims to address the challenges and advancements in lithography technology, materials, and equipment, focusing on enhancing domestic capabilities in the semiconductor industry [19][20]. Group 1: Conference Overview - The conference will take place on July 9-10, 2025, at the Sheraton Hotel in Hefei, Anhui, with an expected attendance of 300 participants [14]. - The event will feature over 20 guest speakers discussing various topics related to the lithography industry, including advanced lithography technologies and the development of photolithography materials [12][11]. Group 2: Key Topics and Discussions - Discussions will cover the latest research and application prospects of cutting-edge lithography technologies such as EUV, electron beam lithography, and nanoimprint [11]. - The conference will analyze the current state and technological bottlenecks of domestic photolithography materials, including photoresists and wet electronic chemicals, and explore solutions for improving self-sufficiency and quality [11][20]. Group 3: Featured Speakers and Presentations - Dr. Sam Sun, a leading scientist in the field of photoresists and founder of Weifang Xingtai Microelectronics Materials Co., will present on the historical and future perspectives of CAR photoresists [4][2]. - Other notable speakers include industry experts from various institutions discussing topics such as high-performance heterogeneous integration technology and the development of advanced packaging materials [7][8]. Group 4: Industry Challenges - The domestic photolithography industry faces significant challenges, including low self-sufficiency rates in high-end photoresists and reliance on imports for certain high-purity chemical products [19][20]. - The conference aims to foster collaboration among research institutions, universities, and enterprises to accelerate technological innovation and enhance the overall competitiveness of the lithography industry [20].
群贤毕至,共襄盛会——IWAPS 2025诚邀投稿!
半导体行业观察· 2025-06-22 03:23
Core Viewpoint - The 9th International Advanced Lithography Technology Symposium (IWAPS) will be held on October 14-15, 2025, in Shenzhen, aiming to create a global platform for communication and collaboration in the lithography technology field [4]. Group 1: Event Overview - The symposium is organized by the China Integrated Circuit Innovation Alliance and the Chinese Optical Society, with support from various institutions, including the Chinese Academy of Sciences and the Shenzhen Semiconductor and Integrated Circuit Industry Alliance [4]. - IWAPS aims to build a dialogue platform covering the entire lithography industry chain, including equipment, process technology, metrology, mask materials, computational lithography, and new technologies [4]. Group 2: Participation and Submission - Papers submitted to the symposium will be reviewed for inclusion in the SPIE Digital Library and EI [8][12]. - The abstract submission deadline is July 31, 2025, and the full paper submission deadline is September 30, 2025 [11][12]. - Authors are encouraged to submit abstracts that clearly describe the nature, research topics, and significance of their work, with a maximum of 500 words [11]. Group 3: Historical Context - IWAPS has been held annually since its inception, with previous events taking place in various cities, including Beijing, Xiamen, Nanjing, Chengdu, and Lishui [13][20][21][29]. - The symposium has successfully facilitated discussions and advancements in lithography technology over the years, contributing to the growth of the industry [36].
数家平台型上市企业在光刻材料领域的业务及项目布局(二)
势银芯链· 2025-06-19 05:51
Core Viewpoint - The article discusses the current state and future prospects of the semiconductor mask market in China, highlighting the dominance of international players and the low domestic production rates of high-end masks [1]. Group 1: Market Overview - The global semiconductor mask market is primarily consumed by wafer fabs or IDM manufacturers, with low-end products outsourced to independent third-party manufacturers [1]. - Major international companies such as Photronics (USA), Toppan (Japan), and DNP (Japan) dominate the Chinese semiconductor mask market [1]. - The domestic production rate of semiconductor masks in China is approximately 10%, with 90% of masks imported, and the localization rate for high-end masks is only 3% [1]. Group 2: Company Performance - Longtu Optoelectronics achieved a revenue growth of 17.59% in 2024 for flat panel display masks, driven by increased new product development and production scale [4]. - The revenue from semiconductor chip masks for Longtu Optoelectronics grew by 33.98% in 2024, attributed to enhanced technical capabilities and optimized product structure [4]. - The company has reached international standards for semiconductor masks above the 130nm process node, with successful mass production of 130nm masks and ongoing development for higher nodes [5]. Group 3: Product Capabilities - Longtu Optoelectronics has developed high-precision TFT masks and is advancing in high-specification semi-transparent masks and PSM technology [6]. - Lu Wei Optoelectronics reported a revenue increase of 30.21% in 2024, with significant growth in OLED masks and advanced packaging masks becoming a second growth curve [6]. - The company has achieved mass production of 180nm process node semiconductor masks and is working on 150nm and 130nm mask technologies [8]. Group 4: Industry Events - The 2025 TrendBank (5th) Lithography Industry Conference will be held on July 9-10 in Hefei, aiming to gather experts and industry leaders to discuss advancements and challenges in lithography technology [10].
复旦大学未来信息创新学院 副研究员 李自力确认演讲 | 2025势银(第五届)光刻产业大会(PRIC 2025)
势银芯链· 2025-06-18 05:17
Core Viewpoint - The 2025 TrendBank Lithography Industry Conference aims to address the challenges and advancements in lithography technology, materials, and equipment, fostering collaboration among experts and industry leaders to enhance the domestic semiconductor industry's capabilities [24][23]. Conference Details - The conference will take place on July 9-10, 2025, at the Sheraton Hotel in Hefei, Anhui, with an expected attendance of 300 participants [13][6]. - The agenda includes discussions on advanced lithography technologies, photolithography materials, and equipment, covering the entire industry chain [15][14]. Key Topics of Discussion - The conference will explore cutting-edge lithography technologies such as EUV, electron beam lithography, and nanoimprint lithography, along with the current state and technological bottlenecks of domestic photolithography materials [14][22]. - Specific sessions will focus on the development and challenges of photolithography resins, wet electronic chemicals, and mask manufacturing technologies [11][12]. Expert Participation - Notable speakers include Li Zili, a researcher from Fudan University, who will present on guided self-assembly lithography technology for integrated circuit manufacturing [10][7]. - The conference will feature over 20 industry experts sharing insights through keynote speeches and specialized discussions [15]. Industry Challenges - The domestic lithography industry faces significant challenges, including low self-sufficiency rates in high-end photolithography resins and reliance on imports for critical materials and equipment [22][23]. - The conference aims to address these challenges and promote technological innovation and industrial upgrades to enhance the competitiveness of the lithography sector [23][24].