中微半导体设备（上海）股份有限公司 2020 年股票增值权激励计划 第四个行权期符合行权条件的公告 本公司董事会及全体董事保证本公告内容不存在任何虚假记载、误导性陈述 或者重大遗漏，并对其内容的真实性、准确性和完整性依法承担法律责任。 重要内容提示： 证券代码：688012 证券简称：中微公司 公告编号：2024-056 一、本激励计划批准及实施情况 （一）本激励计划方案及履行的程序 （2）授予数量：授予的股票增值权总量为 54.68 万份，约占公司 2020 年股 票增值权激励计划（以下简称"激励计划"）草案公告时公司股本总额 53,486.2237 万股的 0.102%。 | 行权期 | 行权时间 | 行权比例 | | --- | --- | --- | | 第一个行权期 | 自授予完成之日起 12 个月后的首个交 | 25% | | | 易日起至授予完成之日起 个月内的 24 | | | | 最后一个交易日当日止 | | | 第二个行权期 | 自授予完成之日起 个月后的首个交 24 | 25% | | | 易日起至授予完成之日起 36 个月内的 | | | | 最后一个交易日当日止 | | | 第三个行 ...

本公司董事会及全体董事保证本公告内容不存在任何虚假记载、误导性陈述 或者重大遗漏，并对其内容的真实性、准确性和完整性依法承担法律责任。 证券代码：688012 证券简称：中微公司 公告编号：2024-055 中微半导体设备（上海）股份有限公司 2020 年限制性股票激励计划首次授予部分 第四个归属期符合归属条件的公告 重要内容提示： 限制性股票拟归属数量：127.4388 万股 归属股票来源：公司向激励对象定向发行公司 A 股普通股股票 一、本次股权激励计划批准及实施情况 （一）本次股权激励计划方案及履行的程序 1、本次股权激励计划主要内容 （1）股权激励方式：第二类限制性股票。 （2）授予数量：授予的限制性股票总量为 800 万股，约占公司 2020 年限制 性股票激励计划（以下简称"激励计划"）草案公告时公司股本总额 53,486.2237 万股的 1.49%。其中首次授予 670 万股，约占激励计划草案公告时公司股本总额 的 1.25%；预留 130 万股，约占激励计划草案公告时公司股本总额的 0.24%。 （3）授予价格：149.5 元/股（调整后），即满足授予条件和归属条件后，激 励对象可以每股 1 ...

证券代码：688012 证券简称：中微公司 公告编号：2024-053 中微半导体设备（上海）股份有限公司 关于作废处理 2020 年限制性股票激励计划 部分限制性股票的公告 本公司董事会及全体董事保证本公告内容不存在任何虚假记载、误导性陈述 或者重大遗漏，并对其内容的真实性、准确性和完整性依法承担法律责任。 中微半导体设备（上海）股份有限公司（下称"中微公司"或"公司"）于 2024 年8月22日召开第二届董事会第二十五次会议和第二届监事会第二十二次会议， 审议通过了《关于作废处理 2020 年限制性股票激励计划部分限制性股票的议案》， 现将有关事项说明如下： 一、公司 2020 年限制性股票激励计划已履行的决策程序和信息披露情况 1、2020 年 3 月 18 日，公司召开第一届董事会第八次会议，会议审议通过了 《关于公司<2020 年限制性股票激励计划（草案）>及其摘要的议案》、《关于公 司<2020 年限制性股票、股票增值权激励计划实施考核管理办法>的议案》以及 《关于提请股东大会授权董事会办理股权激励相关事宜的议案》等议案。公司独 立董事就激励计划相关议案发表了独立意见。 同日，公司召开第一届监事会 ...

Revenue and Financial Performance - Revenue increased by 36.46% YoY to 3.448 billion yuan in the first half of 2024, with plasma etching equipment revenue reaching 2.698 billion yuan, up 56.68% YoY[3] - Revenue for the first half of 2024 reached RMB 3.45 billion, a year-on-year increase of 36.46%[36] - Revenue for the first half of 2024 reached 3.448 billion yuan, a year-on-year increase of 36.46%[119] - Revenue for the first half of 2024 reached 3.45 billion yuan, a year-on-year increase of 36.46%[120] - Total operating revenue for the first half of 2024 reached 3,447,712,750.84 yuan, a significant increase from 2,526,501,011.91 yuan in the same period last year[190] - Revenue for the first half of 2024 reached 2,836,824,604.18 RMB, a significant increase from 1,716,090,759.78 RMB in the same period of 2023[193] Plasma Etching Equipment - Plasma etching equipment revenue grew by 56.68% to RMB 2.70 billion, contributing 78.26% of total revenue[39] - The company's plasma etching equipment is widely used in advanced integrated circuit manufacturing lines, ranging from 65nm to 5nm and beyond[48] - The company's 12-inch high-end etching equipment has been widely adopted in the production of logic chips from 65nm to 5nm and more advanced nodes[59] - The company's plasma etching equipment is extensively used in the production of advanced 3D NAND and DRAM memory chips[59] - The company's CCP etching equipment shipments in the first half of 2024 exceeded the total shipments for the entire year of 2023, with over 3,600 CCP etching reaction chambers delivered by June 2024[84] - The Primo AD-RIE-e CCP etching equipment shipments in the first half of 2024 were more than double the total shipments for 2023[84] - The company's ICP etching equipment is in mass production on over 60 customer production lines, with the Primo Nanova® series achieving a >70% CAGR in installed chambers over the past three years[86] MOCVD Equipment - MOCVD equipment revenue decreased by 49.04% YoY to 152 million yuan due to declining demand in the blue-green LED and Mini-LED markets[3] - MOCVD equipment revenue decreased by 49.04% to RMB 152 million due to market decline in blue-green LED and Mini-LED sectors[39] - The company's MOCVD equipment is in mass production at leading customer facilities, making it a top-tier GaN-based LED equipment manufacturer globally[48] - The company's PRISMO A7® MOCVD equipment holds a leading position in the global GaN-based LED MOCVD market[61] - The company's PRISMO UniMax® MOCVD equipment for Mini-LED production has started large-scale production at leading clients[61] - The company has shipped over 500 MOCVD chambers, maintaining a leading position in the international GaN-based MOCVD equipment market[88] - The PRISMO UniMax® MOCVD equipment has shipped nearly 150 chambers, leading the international market for Mini-LED display epitaxial wafer production equipment[88] R&D Investment and Innovation - R&D investment in the first half of 2024 surged by 110.84% YoY to 970 million yuan, focusing on six categories of equipment and over 20 new device developments[3] - R&D investment increased by 110.84% to RMB 970 million, accounting for 28.15% of total revenue[38][39] - Total R&D investment in the current period reached 970.49 million yuan, a 110.84% increase compared to the same period last year[66] - R&D investment as a percentage of revenue increased by 9.93 percentage points to 28.15%[66] - Capitalized R&D investment increased by 177.92% to 384.39 million yuan, accounting for 39.61% of total R&D investment[66] - The significant increase in R&D investment is attributed to the expansion of R&D projects, increased material costs, and higher employee compensation[67] - In the first half of 2024, the company's R&D expenditure was 970.49 million yuan, with government subsidies reducing R&D expenses by 18.41 million yuan[68] - The company's R&D investment in the first half of 2024 reached 970 million yuan, a year-on-year increase of 110.84%, accounting for 28.15% of total revenue[84] New Orders and Production - New orders in the first half of 2024 totaled 4.7 billion yuan, a 40.3% YoY increase, with plasma etching equipment orders accounting for 3.94 billion yuan, up 50.7% YoY[3] - New orders in the first half of 2024 totaled RMB 4.70 billion, a year-on-year increase of 40.3%, with etching equipment orders accounting for RMB 3.94 billion[39] - Production of 833 chambers in the first half of 2024, a 420% YoY increase, with a corresponding output value of 6.865 billion yuan[3] - Production of specialized equipment increased by 420% to 833 chambers, with a corresponding output value of RMB 6.87 billion[41] Net Profit and Financial Metrics - Net profit attributable to shareholders decreased by 48.48% YoY to 517 million yuan, primarily due to the absence of a one-time gain from the sale of shares in 2023[3] - Net profit attributable to shareholders decreased by 48.48% to RMB 516.69 million, primarily due to the absence of a one-time gain from the sale of shares in 2023[37] - Adjusted net profit attributable to shareholders, excluding the impact of share-based payments, increased by 11.65% year-on-year to RMB 69,415.23 million[44] - Net profit for the first half of 2024 was 516,250,546.94 yuan, a decrease from 1,002,304,157.67 yuan in the first half of 2023[191] - Net profit attributable to the parent company's owners in the first half of 2024 was 516,998,259.17 RMB, compared to 1,005,234,735.78 RMB in the same period of 2023[192] Subsidiaries and Business Expansion - The company's subsidiaries include 中微亚洲, 中微南昌, 中微临港, 中微汇链, and 中微惠创[28] - The company's subsidiaries, including Zhongwei Huilian, Zhongwei Huichuang, and Xinhui Kang, have made significant progress in new business expansion[104] - The company's subsidiary, Zhongwei Huichuang, has successfully applied purification equipment in various client sites and is actively exploring research in the new energy field[95] - The company's subsidiary, Zhongwei Huilian, has developed a distributed ecological industrial internet platform, covering over 70 industrial scenarios and offering more than 600 microservices for subscription[96] Environmental and Social Responsibility - The company's report includes a section on environmental and social responsibility[25] - The company invested 1,136 million yuan in environmental protection during the reporting period[138] - The company reduced carbon dioxide equivalent emissions by 237 tons through measures such as lowering operational energy consumption[142] - The company achieved green power supply at its Shanghai Jinqiao and Lingang bases by signing renewable electricity procurement agreements[141] - The company aims to achieve carbon neutrality by 2035 and has implemented multiple measures to advance climate change governance[141] - The company joined industry associations such as the Responsible Business Alliance (RBA) and Semiconductor Climate Consortium (SCC) to promote sustainable development[141] Risks and Challenges - The company faces risks from potential changes in government support and tax incentives, which could impact profitability[109] - Supply chain risks persist due to prolonged procurement cycles for key components and materials, potentially affecting equipment delivery and sales[110] - The company is exposed to risks from international trade friction, particularly between China and the US, which could impact operations[112] - Intellectual property disputes and potential infringement pose risks to the company's normal business operations[113] - The company has implemented a comprehensive employee stock ownership plan to retain key technical personnel, but faces risks from increasing competition for talent[114] - The company plans to expand its business through equity investments and mergers and acquisitions, but faces associated risks[115] - The company's R&D investment is significantly lower than that of leading international semiconductor companies, posing a risk of technological obsolescence[118] Shareholder and Equity Information - The company's registered address is at No. 188 Taihua Road, Jinqiao Export Processing Zone (South), Pudong New Area, Shanghai[30] - The company's legal representative is Yin Zhiyao[30] - The company's foreign name is Advanced Micro-Fabrication Equipment Inc. China, abbreviated as AMEC[30] - The company's Chinese name is 中微半导体设备（上海）股份有限公司, abbreviated as 中微公司[30] - The company's main financial indicators and company profile are detailed in Section 2 of the report[30] - The company's report includes a section on changes in shares and shareholder situations[25] - The company's total number of ordinary shareholders at the end of the reporting period was 36,600[172] - Shanghai Venture Capital Co., Ltd. holds 93,483,533 shares, accounting for 15.05% of the total shares[173] - Xunxin (Shanghai) Investment Co., Ltd. holds 80,996,822 shares, representing 13.04% of the total shares[173] - Hong Kong Securities Clearing Company Limited increased its holdings by 5,093,239 shares, totaling 32,939,937 shares, or 5.30% of the total shares[173] - China Merchants Bank Co., Ltd. - ChinaAMC SSE STAR Market 50 ETF holds 29,591,336 shares, accounting for 4.76% of the total shares[173] - China Integrated Circuit Industry Investment Fund Phase II holds 24,440,316 shares, representing 3.93% of the total shares[173] - Industrial and Commercial Bank of China - E Fund SSE STAR Market 50 ETF holds 16,117,546 shares, accounting for 2.59% of the total shares[173] - China Construction Bank - ChinaAMC Semiconductor Chip ETF holds 9,721,241 shares, representing 1.56% of the total shares[174] - Industrial and Commercial Bank of China - Noah Growth Hybrid Fund holds 7,867,231 shares, accounting for 1.27% of the total shares[174] - The total number of shares held by the top 10 shareholders and the top 10 unrestricted shareholders decreased due to share lending/returning activities, with specific changes noted for each shareholder[175] - The company's strategic investor, Huaxin Investment Management Co., Ltd., holds shares with a lock-up period of 4 days, which expired on January 2022[178] - Key executives and core technical personnel, including Chairman and CEO Yin Zhiyao, reduced their shareholdings during the reporting period, with a total reduction of 130,000 shares[179] - The company granted a total of 691,700 restricted shares to key executives and core technical personnel during the reporting period, with a cumulative total of 1,377,059 restricted shares granted[181] Cash Flow and Financial Position - Net cash flow from operating activities in the first half of 2024 was 381.92 million yuan, compared to -685.02 million yuan in the same period last year[120] - Operating cash flow for the period was RMB 381.92 million, compared to a negative RMB 685.02 million in the same period last year[199] - Investment cash inflow totaled RMB 7.21 billion, a decrease from RMB 10.35 billion in the previous year[199] - Investment cash outflow was RMB 5.37 billion, down from RMB 8.70 billion year-over-year[199] - Net cash flow from investment activities increased to RMB 1.84 billion from RMB 1.65 billion[199] - Financing cash inflow decreased to RMB 350.53 million from RMB 210.37 million[199] - Net cash flow from financing activities was negative RMB 399.20 million, compared to positive RMB 197.46 million in the prior year[199] - The company's cash and cash equivalents increased by RMB 1.83 billion during the period[200] - Ending cash and cash equivalents balance reached RMB 5.37 billion, up from RMB 3.65 billion at the start of the period[200] Assets and Liabilities - Total assets increased to 24,241,626,255.77 RMB, up from 21,525,546,561.69 RMB at the end of 2023[184][186] - Cash and cash equivalents rose to 7,649,070,420.06 RMB, compared to 7,090,409,172.79 RMB at the end of 2023[184] - Inventory surged to 6,777,933,020.27 RMB, a significant increase from 4,260,340,245.57 RMB at the end of 2023[184] - Accounts receivable grew to 1,439,491,392.88 RMB, up from 1,164,908,187.07 RMB at the end of 2023[184] - Total liabilities increased to 6,070,931,541.88 RMB, compared to 3,702,441,375.24 RMB at the end of 2023[185][186] - Contract liabilities jumped to 2,535,147,967.53 RMB, a substantial rise from 771,596,755.32 RMB at the end of 2023[185] - Development expenditure increased to 751,875,080.13 RMB, up from 505,792,998.61 RMB at the end of 2023[185] - Fixed assets grew to 2,568,337,527.18 RMB, compared to 1,987,606,137.52 RMB at the end of 2023[184] - Long-term loans stood at 250,000,000.00 RMB, a new addition compared to no long-term loans at the end of 2023[185] - Shareholders' equity increased to 18,170,694,713.89 RMB, up from 17,823,105,186.45 RMB at the end of 2023[186] - Total assets as of the end of the first half of 2024 were 21,487,529,952.56 yuan, up from 18,876,304,430.38 yuan at the end of the first half of 2023[188] - Long-term equity investments increased to 3,019,743,770.10 yuan in the first half of 2024, compared to 2,802,289,825.07 yuan in the same period last year[188] - Contract liabilities surged to 1,613,807,968.08 yuan in the first half of 2024, a significant rise from 230,419,951.67 yuan in the first half of 2023[188] - Total liabilities for the first half of 2024 were 4,509,389,138.38 yuan, up from 1,971,273,266.98 yuan in the first half of 2023[189] - Shareholders' equity increased to 16,978,140,814.18 yuan in the first half of 2024, compared to 16,905,031,163.40 yuan in the same period last year[189] - The company's total non-current assets reached 5,300,356,823.50 yuan in the first half of 2024, up from 4,991,324,756.29 yuan in the first half of 2023[188] Other Financial Metrics - Non-recurring gains and losses amounted to RMB 33,463,805.67, including gains from the disposal of non-current financial assets of RMB 9,886,212.19 and government subsidies of RMB 30,367,126.05[42][43] - The company's contract liabilities increased significantly by 228.56% to 2.54 billion RMB, driven by sustained order growth and increased production and shipment volumes[124] - Accounts payable rose by 68.42% to 2.20 billion RMB due to increased procurement activities[124] - Overseas assets amounted to 674 million RMB, accounting for 2.78% of total assets[125] - The company's investment in external equity increased by 21.55% to 98.33 million RMB compared to the same period last year[126] - The fair value of trading financial assets, primarily bank wealth management products, decreased to 493 million RMB from 1.87 billion RMB at the beginning of the period[127] - Other non-current financial assets increased by 3.51% to 1.24 billion RMB, with a significant 164.36% increase in prepaid rental subscription balances[124] - The company added 250 million RMB in long-term loans during the reporting period[124] - The fair value of the company's equity investments in listed companies decreased by 0.40 billion RMB, with a total ending book value of 4.70 billion RMB[128] - The company invested 35 million RMB in private equity fund A, representing a 2.35% ownership stake, with a cumulative profit impact of 15 million RMB[130] - Zhongwei Lingang, a subsidiary, reported total assets of 1,010,883.23 million yuan, net assets of 139,376.35 million yuan, operating income of 200,442.02 million yuan, and net profit of 15,063.79 million yuan[131] - Zhongwei Nanchang, another subsidiary, reported total assets of 435,433.25 million yuan, net assets of 173,096.83 million yuan, operating income of 147,456.12 million yuan, and net profit of 25,693.79 million yuan[131] - Zhongwei International, responsible for overseas sales, reported total assets of 74,141.41 million yuan, net assets of 5,350.79 million yuan, operating income of 21,705.13 million yuan, and a net loss of 5,271.60 million yuan[131] Corporate Governance and Shareholder Commitments - The company held its 2023 Annual General Meeting on April 17, 2024, with resolutions published on the Shanghai Stock Exchange website[132] - The company approved a

中微半导体设备（上海）股份有限公司监事会 关于 2020 年股票增值权激励计划 第四个行权期行权名单的核查意见 中微半导体设备（上海）股份有限公司（以下简称"公司"）监事会依据《中 华人民共和国公司法》（以下简称"《公司法》"）、《中华人民共和国证券法》（以 下简称"《证券法》"）、《上市公司股权激励管理办法》（以下简称"《管理办法》"）、 《上海证券交易所科创板股票上市规则》（以下简称"《上市规则》"）和《中微 半导体设备（上海）股份有限公司章程》（以下简称"《公司章程》"）等有关规 定，对公司 2020 年股票增值权激励计划（以下简称"本次激励计划"）第四个行 权期行权名单进行审核，发表核查意见如下： 公司2020年股票增值权激励计划第四个行权期6名激励对象符合《公司法》、 《证券法》等法律、法规和规范性文件以及《公司章程》规定的任职资格，符合 《管理办法》、《上市规则》等法律、法规和规范性文件规定的激励对象条件，符 合本次激励计划规定的激励对象范围，其作为公司本次激励计划激励对象的主体 资格合法、有效，激励对象获授股票增值权的行权条件已成就。 监事会同意公司为本次符合条件的 6 名激励对象办理行权，对应 ...

为践行以"投资者为本"的上市公司发展理念，维护公司全体股东利益，基 于对公司未来发展前景的信心及价值的认可，中微半导体设备（上海）股份有限 公司（以下简称"公司"）于 2024 年 3 月 19 日发布 2024 年度"提质增效重回 报"行动方案（以下简称"行动方案"），以进一步提升公司经营效率，强化市 场竞争力，保障投资者权益，树立良好的资本市场形象。公司根据行动方案内容， 积极开展和落实各项工作，现将 2024 年上半年的主要工作成果报告如下。 一、专注公司核心业务，突破创新提升竞争力，以良好的业绩成长回报投资 半导体微观加工设备作为数码产业的基石，是发展集成电路和数码产业的关 键，中微公司自 2004 年成立以来，一直致力于开发和提供先进的微观加工所需 的高端关键设备，是典型的新质生产力代表。凭借创新的研发团队和深厚的客户 关系，公司聚焦布局核心设备，关键技术不断突破创新，并快速扩增产品线及扩 大产品在国内领先客户的市场占有率。公司目前可以提供 5 纳米及更先进的芯片 刻蚀设备，从 2012 年到 2023 年的十余年中，销售额年均增长率超过 35%。公司 2024 年上半年新增订单金额约 47.0 亿 ...

关于中微半导体设备（上海）股份有限公司 进一步明确募集资金投资项目相关事项的核查意见 海通证券股份有限公司（以下简称"海通证券"或"保荐机构"）作为中微 半导体设备（上海）股份有限公司（以下简称"中微公司"或"公司"）首次公 开发行股票并上市及2020年度向特定对象发行股票持续督导保荐机构，根据《证 券发行上市保荐业务管理办法》《上市公司监管指引第2号——上市公司募集资金 管理和使用的监管要求》《上海证券交易所科创板股票上市规则》《上海证券交易 所科创板上市公司自律监管指引第1号——规范运作》等有关规定，对公司进一 步明确募集资金投资项目相关事项进行了核查，具体情况如下： 一、募集资金基本情况 中国证券监督管理委员会于2021年3月3日出具证监许可[2021]645号文《关 于同意中微半导体设备（上海）股份有限公司向特定对象发行股票注册的批复》 核准了公司向特定对象发行80,229,335股人民币普通股A股股票。截至2021年6月 22日止，公司完成了人民币普通股A股80,229,335股的发行，每股发行价格为人民 币102.29元，股款以人民币缴足，合计人民币820,665.87万元，扣除承销及保荐费 用共 ...

证券代码：688012 证券简称：中微公司 公告编号：2024-054 中微半导体设备（上海）股份有限公司 关于调整公司 2020 年股票增值权激励计划行权价格的公告 本公司及董事会全体成员保证信息披露的内容真实、准确、完整，没有虚假 记载、误导性陈述或者重大遗漏。 2、2020 年 4 月 21 日，公司召开 2020 年第一次临时股东大会，审议并通过 了《关于公司<2020 年股票增值权激励计划（草案）>及其摘要的议案》、《关 于公司<2020 年限制性股票、股票增值权激励计划实施考核管理办法>的议案》、 《关于提请股东大会授权董事会办理股权激励相关事宜的议案》。 3、2020 年 4 月 22 日，公司于上海证券交易所网站（www.sse.com.cn）披露 《关于公司 2020 年限制性股票、股票增值权激励计划内幕信息知情人买卖公司 1 股票情况的自查报告》（公告编号：2020-023）。 4、2020 年 6 月 5 日，公司召开第一届董事会第十二次会议，审议通过了《关 于公司<2020 年股票增值权激励计划（草案修订稿）>及其摘要的议案》等议案。 公司独立董事就本激励计划相关议案发表了独立意见。 ...

证券代码：688012 证券简称：中微公司 公告编号：2024-051 中微半导体设备（上海）股份有限公司 第二届监事会第二十二次会议决议公告 本公司监事会及全体监事保证本公告内容不存在任何虚假记载、误导性陈述 或者重大遗漏，并对其内容的真实性、准确性和完整性依法承担法律责任。 一、监事会会议召开情况 中微半导体设备（上海）股份有限公司（以下简称"中微公司"或"公司"）第 二届监事会第二十二次会议于2024年8月22日召开。本次会议的通知于2024年8月 14日通过邮件方式送达全体监事。会议应出席监事3人，实际到会监事3人，会议 由监事会主席邹非女士主持。会议的召集和召开程序符合有关法律、行政法规、 部门规章、规范性文件和公司章程的规定，会议决议合法有效。 具体内容详见公司同日披露于上海证券交易所网站（www.sse.com.cn）的相 关公告及文件。 （二）审议通过《关于 2024 年半年度募集资金存放与使用情况专项报告的 议案》 根据《中华人民共和国公司法》《中华人民共和国证券法》《上市公司监管指 引第 2 号——上市公司募集资金管理和使用的监管要求》《上海证券交易所科创 板上市公司自律监管指引第 1 号 ...

证券代码：688012 证券简称：中微公司 公告编号：2024-057 中微半导体设备（上海）股份有限公司 关于进一步明确募集资金投资项目相关事项的公告 根据《中微半导体设备（上海）股份有限公司 2020 年度向特定对象发行 A 股股票募集说明书》及《中微公司：关于调整向特定对象发行股票募投项目募集 资金投入金额的公告》，本次募投项目情况如下： | 项目名称 | 募集资金承诺投资总额（万元） | 调整后投资总额（万元） | | --- | --- | --- | | 中微产业化基地建设项 目 | 317,000.00 | 317,000.00 | | 中微临港总部和研发中 心项目 | 375,000.00 | 375,000.00 | | 科技储备资金 | 308,000.00 | 119,816.24 | | 合计 | 1,000,000.00 | 811,816.24 | 二、本次进一步明确募集资金投资项目相关事项 根据《中微半导体设备（上海）股份有限公司 2020 年度向特定对象发行 A 股股票募集说明书》，募投项目科技储备资金将用于满足新产品协作开发项目、 对外投资并购项目等需求。公司为提升募集资金的 ...